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Surplus Industrial Technology Limited
Surplus Industrial Technology Limited We offer a variety of equipment for heating high-purity fluids and gases, including chemical PFA/PTFE Inline heaters, deionized water heater, PTFE heat exchanger
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Customizable Inline Chemical Heater Low Watt Density Design Inline Fluid Heater

Surplus Industrial Technology Limited
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Customizable Inline Chemical Heater Low Watt Density Design Inline Fluid Heater

Brand Name : Surplus

Model Number : Inline chemical Heater 018

Certification : ISO9001,CE

Place of Origin : China

MOQ : 1 PCS

Price : Negotiable

Payment Terms : T/T

Supply Ability : 50 PC/Month

Delivery Time : 10-15 working days

Packaging Details : Wooden Case or Carton Box

Name : Industrial Unmatched Semiconductor Process Inline Fluid Heater Inline Chemical Heater

Voltage : 230V(Customizable),Single Phase(three phase)

Power : 2kw-18KW

Material : PFA Housing

Heater Applications : heating deionized water, acids, and less aggressive process chemistries use in high-purity processes of semiconductor, solar, MEMS manufacturing, and other industries using high-purity fluids.

Market : Semiconductor

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Industrial Unmatched Semiconductor Process Inline Fluid Heater Inline Chemical Heater

Faster heatup: Single heater chamber sizes up to 18kW.

Rapid installation: Customized plumbing connections

Long heater life for reduced cost of ownership (COO):

Patented heater gas purge system continuously removes any chemical permeation and ensures long element life.

Long heater life and clean operating: Patented heater gas purge system continuously removes chemical permeation and ensures exceptionally long element life. This system also protects against any potential ionic contamination of the chemistry.

Rugged construction: Thick walled chamber provides long service life in the harshest high temperature applications.

Exceptionally clean performance: Thick fluoropolymersheath minimizes permeation. Element purge monitoring minimizes ionic contamination potential. Cleanroom assembly and testing ensures the highest manufacturing standards.

Outstanding chemical compatibility: All fluoropolymerwetted parts compatible with virtually any chemistry.

Excellent temperature stability: Low watt density design enables accurate control of process temperature.

Applications Include:

SC1: ammonium hydroxide (NH4OH), and hydrogen peroxide (H2O2)
SC2: hydrochlorice acid (HCl) and hydrogen peroxide Buffered oxide etch (BOE) process: hydrofluoric acid (HF) and ammonim fluoride (NH4F)

Nitride etch/strip: phosphoric acid (H3PO4)Various acids such as:

Hydrochloric (HCl)

Hydrofluoric (HF)

Acetic (C2H4O2)

Nitric (HNO3)

Sulfuric (H2SO4)

Sulfuric acid and hydrogen peroxide

Sulfuric acid and ozone (O3)

Hydrofluoric acid and glycol (C2H6O2)

Potassium hydroxide (KOH)

Sodium hydroxide (NaOH)

Electroless nickel Electroless copper Electroless gold Deionized water

Some solvents (consult factory)

Benefits and Specifications

  • Unmatched heating of semiconductor process fluids upto 210°C.

  • Patented heater gas purge system ensures long element life and reduced cost of ownership.

  • Thick walled chamber provides long service life in the harshest high temperature applications.

  • Element purge monitoring minimizes ionic contamination potential. Cleanroom assembly and testing ensures the highest manufacturing standards.

  • All fluoropolymer wetted parts provide outstandingcompatibility with virtually any chemistry.

  • Low watt density design enables precise and stable control of process temperature.

  • PVDF high temperature mounting brackets (Hightemperature model)

  • Options:

  • Horizontally mounted configuration

  • Integral cooling coils

  • 100 ohm RTDs or “J”, “K”, or “E” type process and

    element thermocouples

  • Lower watt density heaters for special applications

Maximum Working Pressure:

• 100 PSIG (7 Bar) at 25oC

• 43 PSIG (. Bar) at 180oC

Heater Sizes: 1,000 watts up to 18,000 watts

Heater Voltages Available:
• 200 to 600 volts, single or three phase (12kW and

larger requires three phase).


Watt Density: 10 watts per square inch (1.5w/cm2)

Fluid Connections Available:
• 1⁄4” (6mm) to 1” (25mm) flared
• 1⁄2” (12mm) to 1” (25mm) Super 300 Type Pillar®•

Other connections available, consult factory

Applications

Semiconductor Wet Processes

Sterilization/Cleaning

Solar/Photovoltaic Wafer Cleaning

Safety Features

  • Liquid level sensor

  • Ground wire options

  • Over-temperature thermocouple

  • Process thermocouple

Specifications

Heater
PFA In-line Chemical Heater
Wattages
1.5-12 kW
Process Chemistries
Dilute Hydrofluoric acids (DHF),
Buffered Hydrofluoric acids (BHF),
Buffered Oxide etch (BOE),
Alkaline Chemicals (TMAH, KOH, NAOH),
Fluorinated Solvents,
Hydrofluoric Acid,
Glycol, and much more.
Max Operating Temperature
180°C (consult factory
for higher temperatures)
Max Pressure
40 psi at 180°C
Voltages
200-400VAC,
single or 3 phase
model dependent

Industries

  • Semiconductor Fabrication
  • Solar Cell Manufacturing
  • Flat-Panel Display, LEDs & Electronics
  • Chemicals Manufacturing
  • Industrial Manufacturing

Others Applications

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Customizable Inline Chemical Heater Low Watt Density Design Inline Fluid Heater

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Customizable Inline Chemical Heater Low Watt Density Design Inline Fluid Heater

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.Customizable Inline Chemical Heater Low Watt Density Design Inline Fluid Heater

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Customizable Inline Chemical Heater Low Watt Density Design Inline Fluid Heater
6HX SERIES
Low watt density, 6 element fluoropolymer (PTFE) sleeved 304 stainless elements inert to most solutions. Three phase. 2000-12000 watts, 208-600 volts.
Customizable Inline Chemical Heater Low Watt Density Design Inline Fluid Heater

3HXOL SERIES

Low watt density, 3 element, bottom heater. Fluoropolymer (PTFE) sleeved 304 stainless elements inert to most solutions . 3000-18000 watts, 208-480 volts.

Customizable Inline Chemical Heater Low Watt Density Design Inline Fluid Heater


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